Bonded MEMS Mirrors
Bonded MEMS Mirrors
Model：Bonded MEMS Mirrors
Description：
Description：
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Bonded Mirrors are fabricated separately from the silicon actuator structure and are intended for subsequent microassembly on top of devices. Because these mirrors are attached from above the device actuator structure, they do not occupy a part of the actuator area and therefore can be essentially made in arbitrary sizes.
The Bonded Mirrors methodology allows users to select the size, as well as the geometry of mirrors for each individual application, in order to optimize the trade-offs between speed, beam size, and scan angle. Mirrors are bonded onto ready-made actuators, providing the ability to economically adapt a small set of fabricated devices for a wide range of applications.
