Design Features
● Increases process throughput with innovative, dynamically optimized design
● Provides superior dynamic accuracy & improves process yield with high-resolution feedback
● Enhances thermal stability with optional air & water cooling
● Offers system design flexibility with a multitude of optical configurations
● Synchronizes easily with other motion axes, offering seamless integration & ease of use
Key Applications
AGV-XPO is ideal for high-throughput applications that require superior dynamic precision, minimal following error and rapid move-and-settle performance, including:
● Display processing
● High-speed drilling & cutting
● Electronics manufacturing
● Large-field & long focal length scanning
● Femtosecond laser processing
Structurally Optimized for High Dynamics
Our AGV-XPO scan heads are engineered from the ground up to deliver exceptionally high speeds and accelerations while simultaneously providing outstanding part-path accuracy. Key to this capability is a novel motor design, featuring an ultra-stiff, low-inertia rotor paired with a high-efficiency stator, resulting in increased bandwidth and reduced tracking errors when compared to more traditional galvo motor designs. Plus, specially optimized mirrors and mirror mounts further help to improve dynamic performance by increasing the torsional stiffness and reducing the rotational inertia.
Superior Feedback Resolution
A high-resolution feedback device is paramount to achieving dynamic accuracy at high speeds. AGV-XPO is available in two feedback configurations to suit a diverse range of application requirements. For applications that demand the highest levels of acceleration and have short-to-medium effective focal lengths, a high-resolution position encoder with digitally interpolated output signals and a low-inertia scale (-E1 option) is preferred. For high-dynamic applications that require the finest part-path accuracy and/or utilize long effective focal lengths, an ultra high-resolution encoder with a feedback resolution finer than 0.0002 µrad (-E2 option) is available.
Configuration Flexibility
AGV-XPO is available with multiple aperture sizes and a broad selection of optical coatings and focusing optics to support a diverse range of lasers and applications. We can also supply customized optics and optical mounting features upon request. Additionally, AGV-XPO can be configured with air-cooled mirrors, water-cooled motors or both. These active cooling features help to preserve laser spot placement accuracy in the presence of thermal disturbances caused by the laser and by aggressive motion profiles. Finally, all Aerotech laser scan heads can be effortlessly coordinated with other types of motion axes (servo, stepper, piezo, hexapod, etc.) using an Aerotech controller, resulting in simplified system integration and optimal ease of use.
Advanced Programming Features
The AGV-XPO uses all the advanced motion and position synchronized output (PSO) capabilities that Aerotech has developed for traditional servo-based laser processing applications. Contouring functions can be used to help minimize trajectory overshoot. The laser can be triggered based on the position feedback of the mirrors with PSO to ensure consistent spot overlap as the scanner changes speed. Aerotech’s infinite field of view (IFOV) function seamlessly combines servo and scanner motion to extend the marking capability of the scanner across the entire travel of the servo stages, eliminating stitching errors that can occur in a more traditional step-and-scan process.
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AGV10XPO |
AGV14XPO |
AGV20XPO |
OPTICAL PERFORMANCE |
Beam Aperture |
10 mm |
14 mm |
20 mm |
Maximum Scan Angle |
±20° |
Beam Displacement |
12.6 mm |
16.5 mm |
23.2 mm |
Feedback Resolution |
0.012 µrad (25 bit) (-E1)
0.00016 µrad (32 bit) (-E2) |
Dither (Min. Incremental Motion)(2) |
0.4 µrad RMS (-E1)
0.02 µrad RMS (-E2) |
Accuracy |
50 µrad pk-pk |
Repeatability(3) |
0.4 µrad RMS |
Gain Error |
0.05 mrad |
Non-Linearity |
0.01% |
DYNAMIC PERFORMANCE |
Tracking Error |
0 µsec |
Peak Acceleration(4)(5) |
355,000 m/s2 (-E1) |
262,000 m/s2 (-E1) |
95,000 m/s2 (-E1) |
300,000 m/s2 (-E2) |
231,000 m/s2 (-E2) |
88,000 m/s2 (-E2) |
Continuous Acceleration(4)(6) |
95,000 m/s2 (-E1) |
66,000 m/s2 (-E1) |
25,000 m/s2 (-E1) |
80,000 m/s2 (-E2) |
58,000 m/s2 (-E2) |
23,000 m/s2 (-E2) |
Positioning Speed(4) |
84 m/s (-E1) |
81 m/s (-E1) |
55 m/s (-E1) |
48 m/s (-E2) |
48 m/s (-E2) |
48 m/s (-E2) |
Jump & Settle Time, 1 mm Move(4)(7) |
210 µs (-E1) |
225 µs (-E1) |
280 µs (-E1) |
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